Investment in new production tools for the semiconductor equipment industry – Jenoptik is investing a low double-digit million euro sum in state-of-the-art systems for a high-tech plant currently under construction in Dresden.
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The new electron beam lithography system (E-Beam) is used to manufacture high-precision microscopic optical components for customers in the semiconductor and optical communications sectors. The manufacturer is Vistec Electron Beam GmbH, a Jena-based specialist in electron beam technology. The system is scheduled for delivery in early 2025.
Create the smallest structures with maximum precision
This type of electron beam lithography system can “write” structures with a precision in the 10 nanometer range (about 1/2,000th of a human hair) on substrates up to 300 mm in diameter.
The Vistec SB3050-2 electron beam lithography system is based on the so-called variable geometry beam principle, which allows even large areas to be structured very accurately and effectively.
A high level of automation combined with flexibility in terms of available substrates is an additional feature of the Vistec SB3050-2, enabling its use in industrial environments. This system is equipped with a cell projection function, opening up more application possibilities in micro-optics.
Jenoptik has been active in Dresden since 2007. With its new high-tech plant at Airportpark Dresden, the company is expanding its production capabilities while consolidating production currently distributed across several small external sites. Cleanroom production at the new plant reaches 2,000 square meters with a cleanroom area of ISO 5 and 3 classes and meets the highest requirements for anti-vibration and temperature stability.
High environmental standards are taken into account throughout the plant. Jenoptik is committed to meeting the current most comprehensive and stringent building standards in terms of sustainability with the “KfW 40 Standard” and “LEED Gold Standard Certification”. At the same time, high-quality jobs will be created and the number of employees on site will increase to more than 120 people in total. The Saxon capital will therefore become a key location in the field of micro-optics.
About Jenoptik
Optical technology forms the basis of our business. Jenoptik is a global photonics group and consists of two divisions: Advanced Photonic Solutions and Smart Mobility Solutions. Non-photon activities, specifically for the automotive market, operate as independent brands within non-photon portfolio companies.
Our key markets primarily include semiconductors and electronics, life sciences and medical technology, and smart mobility. Headquartered in Jena (Germany), the Jenoptik Group employs more than 4,400 people worldwide. JENOPTIK AG is listed on the Frankfurt German Stock Exchange and traded on MDax and TecDax. In fiscal 2022, Jenoptik generated revenue of 980.7 million euros.
About Vistec Electron Beam GmbH
Long-standing equipment supplier Vistec Electron Beam GmbH, Jena (Germany) offers leading technology solutions for advanced electron beam lithography. Electron beam lithography systems based on the variable shape beam (VSB) principle are mainly utilized in industrial and advanced research applications such as compound semiconductor direct writing, mask writing, and electron beam direct writing in semiconductor manufacturing, including photonics. and several new emerging markets.
Efficient data processing and innovative exposure strategies (e.g. cell projection) open up new applications, especially in the field of AR/VR. Vistec's technology features automated handling as well as high flexibility, writing accuracy and productivity, making it ideal for prototyping and low-volume production. In addition to its production facilities in Germany, Vistec operates service and support centers in Asia Pacific, the United States and Europe.